|
Year |
Event |
|
1987 |
Commissioned by the Graduate School of the Chinese Academy of Sciences (CAS) to develop white light / laser annealing equipment. |
|
1989 |
First Delivery of KST-02 RTP to the Institute of Low Energy Nuclear Physics, Beijing Normal University. |
|
1990 |
First Delivery of RTP300 to the Institute of Semiconductors, CAS. |
|
1993 |
Delivery of RTP300 to The Hong Kong Polytechnic University. |
|
1997 |
First Delivery of RTP500 to the 13th Research Institute of CEC (China Electronics Corporation). |
|
1999 |
Delivery of RTP500 to The Hong Kong Polytechnic University. |
|
2003 |
First Delivery of RTP500V to Beijing Jiaotong University. |
|
2003 |
Dongxing Design Office spun off from State-Owned Factory 706 to establish Beijing Dongzhixing Applied Physics Institute. |
|
2004 |
First Delivery of RTP400 to the Institute of Microelectronics, Tsinghua University. |
|
2005 |
Delivery of RTP300 to Youngstown State University, USA. |
|
2006 |
Delivery of RTP500V to Nanyang Technological University, Singapore. |
|
2007 |
Director He Lingyu retired; He Ning took over R&D and management. |
|
2008 |
First Delivery of RTP500E to Qingdao University. |
|
2009 |
First Delivery of RTP600 to the Institute of Microelectronics, CAS. |
|
2011 |
First Delivery of RTPlugin to Sino-Micro Semiconductor Equipment Co., Ltd. |
|
2011 |
Delivery of RTP300 to Beijing No.4 High School. |
|
2012 |
Delivery of RTP300 to the University of Dundee, UK. |
|
2013 |
First Delivery of RTP500V+ to the Institute of Microelectronics, CAS. |
|
2014 |
First Delivery of RTP500VL to Shanghai Jiao Tong University. |
|
2015 |
First Delivery of RTP600V+ Dual-Temperature Zone RTP to the Institute of Electrical Engineering, CAS. |
|
2016 |
Partnered with Tsinghua University and Zhongsheng Optoelectronics to develop 12-inch MOCVD. |
|
2017 |
Delivery of RTP500Z to enterprises including Hebei Guansen, Zhongke Guangxin, and Kunyuan Optoelectronics. |
|
2019 |
Delivery of 6-inch RTP600Z to enterprises including Shandong Tianyue, Mingpu Magnetics, and Quanlei Optoelectronics. |
|
2020 |
Delivery of 8-inch RTP800V to Shandong University and the Institute of Electrical Engineering, CAS. |
|
2021 |
Delivery of Ultra-High Temperature RTP and RTP1700 to the Institute of Microelectronics, CAS. |
|
2022 |
Participated in the research project to break the technological bottleneck of SMIC's 12-inch production line. |
|
2023 |
Delivery of RTP800V Automated Loading System to the Institute of Microelectronics, CAS. |